期刊论文

    1. H. Gu, Z. Guo, L. Huang, M. Fang, and S. Liu, "Investigations of Optical Functions and Optical Transitions of 2D Semiconductors by Spectroscopic Ellipsometry and DFT," Nanomaterials 13, 196 (2023). (DOI, PDF)

    2. Z. Guo, H. Gu, Y. Yu, Z. Wei, and S. Liu, "Broadband and Incident-Angle-Modulation Near-Infrared Polarizers Based on Optically Anisotropic SnSe," Nanomaterials 13, 134 (2023). (DOI, PDF)

    3. C. Guo, Y. Shi, H. Wu, Y. Xiang, W. Li, C. Zhang, and S. Liu, "A combination of library search and Levenberg-Marquardt algorithm in optical scatterometry," Thin Solid Films 767, 139670 (2023). (DOI, PDF)

    4. J. Liu, Z. Jiang, S. Zhang, T. Huang, H. Jiang, and S. Liu, "Calibration of polarization effects for the focusing lens pair in a micro-spot Mueller matrix ellipsometer," Thin Solid Films 766, 139656 (2023). (DOI, PDF)

    5. X. Chen, H. Gu, J. Liu, C. Chen, and S. Liu, "Advanced Mueller matrix ellipsometry: Instrumentation and emerging applications," Sci. China Tech. Sci. 65, 2007-2030 (2022). (In Special Issue: Celebrating the 70th Anniversary of School of Mechanical Science and Engineering of HUST). (DOI, PDF)

    6. Z. Guo, H. Gu, M. Fang, L. Ye, and S. Liu, "Giant in-plane optical and electronic anisotropy in tellurene: A quantitative exploration," Nanoscale 14, 12238-12246 (2022). (Front Cover). (DOI, PDF)

    7. M. Fang, H. Gu, Z. Guo, J. Liu, L. Huang, and S.Liu, "Temperature and thickness dependent dielectric functions of MoTe2 thin films investigated by spectroscopic ellipsometry," Appl. Surf. Sci. 605, 154813 (2022). (DOI, PDF)

    8. J. Zhu, J. Liu, T. Xu, S. Yuan, Z. Zhang, H. Jiang, H. Gu, R. Zhou, and S. Liu, "Optical wafer defect inspection at the 10 nm technology node and beyond," Int. J. Extrem. Manuf. 4, 032001 (2022). (DOI, PDF)

    9. C. Chen, X. Chen, Z. Xia, J. Shi, S. Sheng, W. Qiao, and S. Liu, "Characterization of pixelated nanogratings in 3D holographic display by an imaging Mueller matrix ellipsometry," Opt. Lett. 47, 3580-3583 (2022). (DOI, PDF)

    10. L. Chen, H. Gu, X. Ke, X. Zhao, K. Ding, S. Jiao, Y. Gu, and S. Liu, "Multi-parameter and multi-objective optimization of stratified OLEDs over wide field-of-view considering thickness tolerance," Opt. Express 30, 29546-29563 (2022). (DOI, PDF)

    11. L. Zhang, J. Liu, J. Zhu, H. Jiang, and S. Liu, "Femtosecond laser induced damaging inside fused silica observed by a single-pulse ultrafast measurement system," Opt. Express 30, 26111-26119 (2022). (DOI, PDF)

    12. H. Gu, H. Jiang, X. Chen, C. Zhang, S. Liu, "Superachromatic polarization modulator for stable and complete polarization measurement over ultra-wide spectral range," Opt. Express 30, 15113-15133 (2022). (DOI, PDF)

    13. L. Zhang, J. Liu, H. Jiang, H. Gu, and S. Liu, "Layer dependent photoexcited carrier dynamics of WS2 observed using single pulse pump probe method," Chin. Opt. Lett. 20, 100002 (2022). (DOI, PDF)

    14. S. Liu, X. Chen, T. Yang, C. Guo, J. Zhang, J. Ma, C. Chen, C. Wang, C. Zhang, and S. Liu, "Machine learning aided solution to the inverse problem in optical scatterometry," Measurement 191, 110811 (2022). (DOI, PDF)

    15. J. Zhu, N. Zhao, S. Liu, S. Wei, and R. Zhou, "Toward new forms of particle sensing and manipulation and 3D imaging on a smartphone for healthcare applications," Adv. Photon. Res. 3, 2100106 (2022). (DOI, PDF)

    16. M. Fang, H. Gu, B. Song, Z. Guo, and S. Liu, "Thickness scaling effects on the complex optical conductivity of few-layer WSe2 investigated by spectroscopic ellipsometry," Adv. Photon. Res. 3, 2100299 (2022). (DOI, PDF)

    17. L. Zhang, J. Liu, H. Jiang, and S. Liu, "Concentric ring structure on the front surface of fused silica induced by a focused femtosecond pulse," Precision Eng. 74, 242-246 (2022).(DOI, PDF)

    18. M. Fang, H. Gu, B. Song, Z. Guo, and S. Liu, "Thickness and layer stacking order effects on complex optical conductivity and exciton strength of few-layer graphene," ACS Appl. Nano Mater. 5, 1864-1872 (2022). (DOI, PDF)

    19. Z. Jiang, S. Zhang, J. Liu, Q. Li, H. Jiang, and S. Liu, "Error analysis for repeatability enhancement of a dual-rotation Mueller matrix ellipsometer," Front. Phys. 9, 820552 (2022). (DOI, PDF)

    20. C. Chen, L. Nie, Y. Huang, S. Xi, X. Liu, X. Zhang, T. Shi, G. Liao, S. Liu, and Z. Tang, "Embedded growth of colorful CsPbX3 (X = Cl, Br, I) nanocrystals in metal-organic frameworks at Room Temperature," Nanotechnology 33, 175603 (2022). (DOI, PDF)

    21. S. Liu, J. Wang, J. Shao, D. Ouyang, W. Zhang, S. Liu, Y. Li, T. Zhai, "Nanopatterning technologies of two-dimensional materials for integrated electronic and optoelectronic devices," Adv. Mater. 34, 2200734 (2022). (DOI, PDF)

    22. S. Hou, Z. Guo, T. Xiong, X. Wang, J. Yang, Y. Liu, Z. Niu, S. Liu, S. Zhai, H. Gu, and Z. Wei, "Optical and electronic anisotropy of a 2D semiconductor SiP," Nano Res. 15, 8579-8586 (2022). (DOIPDF)

    23. X. Zhao, H. Gu, L. Chen, and S. Liu, "Optical model and optimization for coherent-incoherent hybrid organic solar cells with nanostructures," Nanomaterials 11, 3187 (2021). (DOIPDF)

    24. S. Sheng, X. Chen, C. Chen, J. Zhuang, C. Wang, H. Gu, and S. Liu, "Eigenvalue calibration method for dual rotating-compensator Mueller matrix polarimetry," Opt, Lett. 46, 4618-4621 (2021). (DOIPDF)

    25. C. Chen, X. Chen, C. Wang, S. Sheng, L. Song, H. Gu, and S. Liu, "Imaging Mueller matrix ellipsometry with sub-micron resolution based on back focal plane scanning," Opt. Express 29, 32712-32727 (2021). (DOIPDF)

    26. C. Wang, X. Chen, C. Chen, S. Sheng, L. Song, H. Gu, H. Jiang, C. Zhang, and S. Liu, "Reconstruction of finite deep sub-wavelength nanostructures by Mueller-matrix scattered-field microscopy," Opt. Express 29, 32158-32168 (2021). (DOIPDF

    27. L. Zhang, J. Liu, W. Gong, H. Jiang, and S. Liu, "Diffraction based single pulse measurement of air ionization dynamics induced by femtosecond laser," Opt. Express 29, 18618-18627 (2021). (DOI, PDF)

    28. M. Fang, Z. Wang, H. Gu, B. Song, Z. Guo, J. Zhu, X. Chen, C. Zhang, H. Jiang, and S. Liu, "Complex optical conductivity of Bi2Se3 thin film: Approaching two-dimensional limit," Appl. Phys. Lett. 118, 191101 (2021). (DOI, PDF)

    29. S. Hou, Z. Guo, J. Yang, Y. Liu, W. Shen, C. Hu, S. Liu, H. Gu, and Z. Wei, "Birefringence and dichroism in quasi-1D transition metal trichalcogenides: Direct experimental investigation," Small 17, 2100457 (2021). (DOI, PDF)

    30. B. Song, H. Gu, M. Fang, Z. Guo, Y.Ho, X. Chen, H. Jiang, and S. Liu, "2D Niobium-doped MoS2: Tuning the exciton transitions and potential applications," ACS Appl. Electron. Mater. 3, 2564-2572 (2021).DOI, PDF)

    31. Z. Guo, H. Gu, M. Fang, B. Song, W. Wang, X. Chen, C. Zhang, H. Jiang, L. Wang, and S. Liu, "Complete dielectric tensor and giant optical anisotropy in quasi-one-dimensional ZrTe5," ACS Mater. Lett. 3, 525-534 (2021). (DOI, PDF)

    32. B. Song, J. Hou, H. Wang, S. Sidhik, J. Miao, H. Gu, H. Zhang, S. Liu, Z. Fakhraai, J. Even, J. Blancon, A. Mohite, and D. Jariwala, "Determination of dielectric functions and exciton oscillator strength of two-dimensional hybrid perovskites," ACS Mater. Lett. 3, 148-159 (2021). (DOI, PDF)

    33. K. Zhou, K. Zhang, J. Liu, Y. Liu, S. Liu, G. Cao, and J. Zhu, "An imbalance aware lithography hotspot detection method based on HDAM and pre-trained GoogLeNet," Meas. Sci. Tech. 32, 125008 (2021). (DOI, PDF)

    34. S. Yang, B. Qu, G. Liu, D. Deng, S. Liu, and X. Chen, "Unsupervised learning polarimetric underwater image recovery under nonuniform optical fields," Appl. Opt. 60, 8198-8205 (2021). (DOI, PDF)

    35. L. Zhang, J. Liu, Z. Zhong, H. Jiang, H. Gu, X. Chen, S. Liu, "Beam collapse and refractive index changes inside fused silica induced by loosely focused femtosecond laser," J. Opt. 23, 075402 (2021). (DOI, PDF)

    36. M. Wang, F. Liu, H. Jiang, and S. Liu, "Effective medium approximation based interpretation for Mueller matrix spectra of polydimethylsiloxane gratings," J. Opt. 23, 025403 (2021). (DOI, PDF)

    37. C. Feng, S. Liu, J. Li, M. Li, S. Cheng, C. Chen, T. Shi, and Z. Tang, "Molecular understanding of electrochemical–mechanical responses in carbon-coated silicon nanotubes during lithiation," Nanomaterials 11, 564 (2021). (DOI, PDF)

    38. L. Yao, Z. Zeng, C. Cai, P. Xu, H. Gu, L. Gao, J. Han, X. Zhang, X. Wang, X. Wang, A. Pan, J. Wang, W. Liang, S. Liu, C. Chen, and J. Tang, "Strong Second- and Third-Harmonic Generation in 1D Chiral Hybrid Bismuth Halides," J. Am. Chem. Soc.143, 16095-16104 (2021). (DOI, PDF)

    39. K. Zheng, H. Wang, P. Xu, H. Gu, B. Tu, W. Wang, S. Liu, and Z. Fu, "Effect of nitrogen content on optical properties of transparent γ-AlON polycrystalline ceramics," J. Eur. Ceram. Soc. 41, 4319-4326 (2021). (DOI, PDF)

    40. B. Song, F. Liu, H. Wang, J. Miao, Y. Chen, P. Kumar, H. Zhang, X. Liu, H. Gu, E. A. Stach, X. Liang, S. Liu, Z. Fakhraai, and D. Jariwala, "Giant gate-tunability of complex refractive index in semiconducting carbon nanotubes," ACS Photon. 7, 2896-2905 (2020). (DOI, PDF)

    41. J. Liu, M. Wang, H, Jiang, H. Gu, X. Chen, and S. Liu, "Annealing temperature dependency of optical and structural properties for Cu films," Phys. Rev. B 101, 014107 (2020). (DOI, PDF)

    42. J. Liu, H. Jiang, L. Zhang, H. Gu, X. Chen, and S. Liu, "Thickness dependent native oxidation kinetics observation and prediction for Cu films using spectroscopic ellipsometry," Appl. Surf. Sci. 518, 146236 (2020). (DOI, PDF)

    43. M. Fang, Z. Wang, H. Gu, M. Tong, B. Song, X. Xie, T. Zhou, X. Chen, H. Jiang, T. Jiang, and S. Liu, "Layer-dependent dielectric permittivity of topological insulator Bi2Se3 thin films," Appl. Surf. Sci. 509, 144822 (2020). (DOI, PDF)

    44. H. Gu, S. Zhu, B. Song, M. Fang, Z. Guo, X. Chen, C. Zhang, H. Jiang, and S. Liu, "An analytical method to determine the complex refractive index of an ultra-thin film by ellipsometry," Appl. Surf. Sci. 507, 145091 (2020). (DOI, PDF)

    45. S. Zhang, H. Jiang, H. Gu, X. Chen, and S. Liu, "Attitude metrology based on field-of-view effect of birefringence using high-speed polarimetry," Opt. Lett. 45, 2074-2077 (2020). (DOI, PDF)

    46. Z. Dong, H. Gu, J. Zhu, Y. Shi, L. Nie, J. Lyu, X. Chen, H. Jiang, and S. Liu, "Nonuniform depolarization properties of typical nanostructures and potential applications," Opt. Lett. 45, 1910-1913 (2020). (DOI, PDF)

    47. X. Ke, H. Gu, L. Chen, X. Zhao, J. Tian, Y. Shi, X. Chen, C. Zhang, H. Jiang, and S. Liu, "Multi-objective collaborative optimization strategy for efficiency and chromaticity of stratified OLEDs based on an optical simulation method and sensitivity analysis," Opt. Express 28, 27532-27546 (2020). (DOI, PDF)

    48. S. Zhang, H. Jiang, H. Gu, X. Chen, and S. Liu, "High-speed Mueller matrix ellipsometer with microsecond temporal resolution," Opt. Express 28, 10873-10887 (2020). (DOI, PDF)

    49. C. Wang, X. Chen, H. Gu, H. Jiang, C. Zhang, and S. Liu, "On the limit of low-numerical-aperture imaging scatterometry," Opt. Express 28, 8445-8462 (2020). (DOI, PDF)

    50. X. Zhao, R. Xia, H. Gu, X. Ke, Y. Shi, X. Chen, H. Jiang, H.-L. Yip, and S. Liu, "Performance optimization of tandem organic solar cells at varying incident angles based on optical analysis method," Opt. Express 28, 2381-2397 (2020). (DOI, PDF)

    51. Z. Yang, X. Chen, H. Jiang, and S. Liu, "Fast reconstruction of the aberrated scanning lithographic image by a quadratic imaging model and an integral transfer function," Appl. Opt. 59, 4708-4717 (2020). (DOI, PDF)

    52. Y. Shi, K. Li, X. Chen, P. Wang, H. Gu, H. Jiang, C. Zhang, and S. Liu, "Multi-objective optimization for target designin diffraction-based overlay metrology," Appl. Opt. 59, 2897-2905 (2020). (DOI, PDF)

    53. Z. Zhong, L. Zhang, H. Jiang, H. Gu, X. Chen, C. Zhang, and S. Liu, "Improved Fourier transformation based method for accurate phase and amplitude retrieval in spectral interferometry," J. Opt. 22, 035501 (2020). (DOI, PDF)

    54. X. Chen, J. Liao, H. Gu, C. Zhang, H. Jiang, and S. Liu, "Remote absolute roll-angle measurement in range of 180° based on polarization modulation," Nanomanufact. Metrol. 3, 228–235 (2020). (DOI, PDF)

    55. Z. Zhong, L. Zhang, H. Jiang, W. Gong, H. Gu, X. Chen, and S. Liu, "A Brewster incidence method for shocked dynamic metrology of transparent materials and its error evaluation," AIP Adv. 10, 105203 (2020). (DOI, PDF)

    56. Z. Zhong, W. Gong, H. Jiang, H. Gu, X. Chen, and S. Liu, "Investigation of spatial chirp induced by misalignments in a parallel grating pair pulse stretcher," Appl. Sci. 10, 1584 (2020). (DOI, PDF)

    57. S. Zhang, L. Wang, A. Yi, H. Gu, X. Chen, H. Jiang, and S. Liu, "Dynamic modulation performance of ferroelectric liquid crystal polarization rotators and Mueller matrix polarimeter optimization," Front. Mech. Eng. 15, 256-264 (2020). (DOI, PDF)

    58. L. Qiu, S. Wei, H. Xu, Z. Zhang, Z. Guo, X. Chen, S. Liu, D. Wu, and L. Luo, "Ultrathin polymer nanofibrils for solar-blind deep ultraviolet light photodetectors application," Nano Lett. 20, 644-651 (2020). (DOI, PDF)

    59. X. Zong, H. Gu, L. Ren, B. Tu, W. Wang, S. Liu, and Z. Fu, "A novel spinel-type Mg0.55Al2.36O3.81N0.19 transparent ceramic with infrared transmittance range comparable to c-plane sapphire," Scr. Mater. 178, 428-432 (2020). (DOI, PDF)

    60. H. Gu, B. Song, M. Fang, Y. Hong, X. Chen, H. Jiang, W. Ren, and S. Liu, "Layer-dependent dielectric and optical properties of centimeter-scale 2D WSe2: evolution from a single layer to few layers," Nanoscale 11, 22762-22771 (2019). (DOI, PDF)

    61. B. Song, H. Gu, M. Fang, Y.-T. Ho, X. Chen, H. Jiang, and S. Liu, "Complex optical conductivity of 2D MoS2: a striking layer-dependency," J. Phys. Chem. Lett. 10, 6246-6252 (2019). (DOI, PDF)

    62. X. Ke, H. Gu, X. Zhao, X. Chen, Y. Shi, C. Zhang, H. Jiang, and S. Liu, "Simulation method for study on outcoupling characteristics of stratified anisotropic OLEDs," Opt. Express 27, A1014-A1029 (2019). (DOI, PDF)

    63. H. Gu, X. Chen, H. Jiang, Y. Shi, and S. Liu, "Wide field-of-view angle linear retarder with ultra-flat retardance response," Opt. Lett. 44, 3026-3029 (2019). (DOI, PDF)

    64. B. Song, H. Gu, M. Fang, X. Chen, H. Jiang, R. Wang, T. Zhai, Y. Ho, and S. Liu, "Layer-dependent dielectric function of wafer-scale 2D MoS2," Adv. Opt. Mater. 7, 1801250 (2019). (DOI, PDF)

    65. H. Jiang, H. Peng, G. Chen, H. Gu, X. Chen, Y. Liao, S. Liu, and X. Xie, "Nondestructive investigation on the nanocomposite ordering upon holography using Mueller matrix ellipsometry," Eur. Polym. J. 110, 123-129 (2019). (DOI, PDF)

    66. Z. Zhou, H. Jiang, H. Gu, X. Chen, H. Peng, Y. Liao, S. Liu, and X. Xie, "Strain-optical behavior of polyethylene terephthalate film during uniaxial stretching investigated by Mueller matrix ellipsometry," Polymer 182, 121842 (2019). (DOI, PDF)

    67. X. Chen, J. Liao, H. Gu, Y. Shi, H. Jiang, S. Liu, "Proof of principle of an optical Stokes absolute roll-angle sensor with ultra-large measuring range," Sens. Actuat. A 291, 144-149 (2019). (DOI, PDF)

    68. Z. Dong, X. Chen, X. Wang, Y. Shi, H. Jiang, and S. Liu, "Dependence-analysis-based data-refinement in optical scatterometry for fast nanostructure reconstruction,” Appl. Sci. 9, 4091 (2019). (DOI, PDF)

    69. H. Jiang, Z. Ma, H. Gu, X. Chen, and S. Liu, "Characterization of volume gratings based on distributed dielectric constant model using Mueller matrix ellipsometry," Appl. Sci. 9, 698 (2019). (DOI, PDF)

    70. C. Chen, X. Chao; H. Gu, H. Jiang, C. Zhang, S. Liu, "Calibration of polarization effect of a high-numerical-aperture objective lens with Mueller matrix polarimetry," Meas. Sci. Technol. 30, 025201 (2019). (DOI, PDF)

    71. Z. Yang, X. Chen, H. Jiang, and S. Liu, "In-line wavefront aberration adjustment of a projection lens for a lithographic tool using the dominant mode method," Appl. Opt. 58, 4176-4184 (2019). (DOI, PDF)

    72. J. Liu, J. Lin, H. Jiang, X. Chen, C. Zhang, G. Liao, and S. Liu, "Characterization of dielectric function for metallic thin films based on ellipsometric parameters and reflectivity," Phys. Scr. 94, 085802 (2019). (DOI, PDF)

    73. S. Zhang, C. Chen, H. Jiang, H. Gu, X. Chen, C. Zhang, and S. Liu, "Dynamic characteristics of nematic liquid crystal variable retarders investigated by a high-speed polarimetry, J. Opt. 21, 065605 (2019)(DOI, PDF)

    74. C. Mao, H. Li, H. Gu, J. Wang, Y. Zou, G. Qi, J. Xu, F. Deng, W. Shen, J. Li, S. Liu, J. Zhao, and L. Zhang, "Beyond the thermal equilibrium limit of ammonia synthesis with dual temperature zone catalyst powered by solar light," Chem 5, 2702-2717 (2019). (DOI, PDF)

    75. J. Qu, B. Li, Y. Shen, S. Huo, Y. Xu, S. Liu, B. Song, H. Wang, C. Hu, and W. Feng, "Evaporable glass-state molecules-assisted transfer of clean and intact graphene onto arbitrary substrates," ACS Appl. Mater. Interf. 11, 16272-16279 (2019). (DOI, PDF)

    76. R. Xia, H. Gu, S. Liu, K. Zhang, H.-L. Yip, and Y. Cao, "Optical analysis for semitransparent organic solar cells," Sol. RRL 3, 1800270 (2019). (DOI, PDF)

    77. X. Liu, L. Hu, R. Wang, J. Li, H. Gu, S. Liu, Y. Zhou, and G. Tu, "Flexible perovskite solar cells via surface-confined silver nanoparticles on transparent polyimide substrates," Polymers 11, 427 (2019). (DOI, PDF)

    78. X. Zong, H. Wang, H. Gu, L. Ren, S. Guo, B. Tu, W. Wang, S. Liu, and Z. Fu, "Highly transparent Mg0.27Al2.58O3.73N0.27 ceramic fabricated by aqueous gelcasting, pressureless sintering and post-HIP," J. Am. Ceram. Soc. 102, 6507-6516 (2019). (DOI, PDF)

    79. D. Qi, X. Wang, F. Chen, H. Gu, S. Liu, and R. Gong, "Valid corollaries of polarization separated color attributes for multi-layer dielectric structure," Phys. Scr. 94, 115007 (2019). (DOI, PDF)

    80. C. Chen, X. Chen, Y. Shi, H. Gu, H. Jiang, and S. Liu, "Metrology of nanostructures by tomographic Mueller-matrix scatterometry," Appl. Sci. 8, 2583 (2018). (DOI, PDF)

    81. S. Zhang, H. Gu, J. Liu, H. Jiang, X. Chen, C. Zhang, and S. Liu, "Characterization of beam splitters in the calibration of a six-channel Stokes polarimeter," J. Opt. 20, 125606 (2018)(DOI, PDF)

    82. H. Gu, X. Chen, Y. Shi, H. Jiang, C. Zhang, P. Gong, and S. Liu, "Comprehensive characterization of a general composite waveplate by spectroscopic Mueller matrix polarimetry," Opt. Express 26, 25408-25425 (2018). (DOI, PDF)

    83. Y. Tan, C. Chen, X. Chen, W. Du, H. Gu, and S. Liu, "Development of a tomographic Mueller-matrix scatterometer for nanostructure metrology," Rev. Sci. Instrum. 89, 073702 (2018). (DOI, PDF)

    84. X. Chen, Z. Tao, C. Chen, C. Wang, L. Wang, H. Jiang, D. Fan, Y. Ekinci, and S. Liu, "All-dielectric metasurface-based roll-angle sensor," Sens. Actuat. A 279, 509–517 (2018). (DOI, PDF)

    85. J. Liu, C. Zhang, Z. Zhong, H. Gu, X. Chen, H. Jiang, and S. Liu, "Measurement configuration optimization for dynamic metrology using Stokes polarimetry," Meas. Sci. Technol. 29, 054010 (2018). (DOI, PDF)

    86. X. Chen, H. Gu, H. Jiang, C. Zhang, and S. Liu, "Probing optimal measurement configuration for optical scatterometry by the multi-objective genetic algorithm,” Meas. Sci. Technol. 29, 045014 (2018). (DOI, PDF)

    87. B. Song, H. Gu, S. Zhu, H. Jiang, X. Chen, C. Zhang, and S. Liu, "Broadband optical properties of graphene and HOPG investigated by spectroscopic Mueller matrix ellipsometry," Appl. Surf. Sci. 439, 1079-1087 (2018). (DOI, PDF)

    88. H. Gu, X. Chen, C. Zhang, H. Jiang, and S. Liu, "Study of the retardance of a birefringent waveplate at tilt incidence by Mueller matrix ellipsometer," J. Opt. 20, 015401 (2018). (DOI, PDF)

    89. G. Zhang, R. Xia, Z. Chen, J. Xiao, X. Zhao, S. Liu, H.-L. Yip, Y. Cao, "Overcoming space-charge effect for efficient thick-film non-fullerene organic solar cells," Adv. Energy Mater. 1801609 (2018). (DOI, PDF)

    90. K. Zhang, B. Fan, R. Xia, X. Liu, Z. Hu, H. Gu, S. Liu, H.‐L. Yip, L. Ying, F. Huang, and Y. Cao, "Highly efficient tandem organic solar cell enabled by environmentally friendly solvent processed polymeric interconnecting layer," Adv. Energy Mater. 8, 1703180 (2018). (DOI, PDF)

    91. X. Zhou, X. Hu, J. Yu, S. Liu, Z. Shu, Q. Zhang, H. Li, Y. Ma, H. Xu, and T. Zhai, "2D layered material-based van der Waals heterostructuresfor optoelectronics," Adv. Funct. Mater. 28, 1706587 (2018). (DOI, PDF)

    92. K. Ding, Y. Fang, S. Dong, H. Chen, B. Luo, K. Jiang, H. Gu, L. Fan, S. Liu, B. Hu, and L. Wang, "24.1% external quantum efficiency of flexible quantum dot light-emitting diodes by light extraction of silver nanowire transparent electrodes," Adv. Opt. Mater. 1800347 (2018). (DOI, PDF)

    93. S. Xiang, X. Lv, S. Sun, Q. Zhang, Z. Huang, R. Guo, H. Gu, S. Liu, and L. Wang, "To improve the efficiency of thermally activated delayed fluorescence OLEDs by controlling the horizontal orientation through optimizing stereoscopic and linear structures of indolocarbazole isomers," J. Mater. Chem. C 8, 5812-5820 (2018). (DOI, PDF)

    94. F. Quan, G. Zhang, C. Mao, Z. Ai, F. Jia, L. Zhang, H. Gu, and S. Liu, "Efficient light-driven CO2 hydrogenation on Ru/CeO2 catalysts," Catal. Sci. Technol. 8, 6503-6510 (2018). (DOI, PDF)

    95. H. Zang, H. Wang, H. Gu, X. Zong, B. Tu, P. Xu, B. Wang, W. Wang, S. Liu, and Z. Fu, "Preparation of transparent MgO·1.8Al2O3 spinel ceramics by aqueous gelcasting, presintering and hot isostatic pressing," J. Eur. Ceram. Soc. 38, 4057-4063 (2018). (DOI, PDF)

    96. S. Jiang, C. Huang, H. Gu, S. Liu, S. Zhu, M.-Y. Li, L. Yao, Y. Wu, and G. Zhang, "Ultra uniform Pb0.865La0.09(Zr0.65Ti0.35)O3 thin films with tunable optical properties fabricated via pulsed laser deposition," Materials 11, 525 (2018). (DOI, PDF)

    97. X. Chen, H. Gu, H. Jiang, C. Zhang, and S. Liu, "Robust overlay metrology with differential Mueller matrix calculus," Opt. Express 25, 8491-8510 (2017). (DOI, PDF)

    98. Y. Shi, X. Chen, Y. Tan, H. Jiang, and S. Liu, "Reduced-basis boundary element method for fast electromagnetic field computation," J. Opt. Soc. Am. A 34, 2231-2242 (2017). (DOI, PDF)

    99. Z. Tao, X. Chen, H. Jiang, C. Zhang, and S. Liu, "Polarization multiplexed all-dielectric metasurfaces for wavefront manipulation in a transmission mode," J. Opt. 19, 105102 (2017). (DOI, PDF)

    100. X. Kang, W. Cai, H. Gu, S. Liu, and S. Cui, "A facile and environment-friendly method for fabrication of polymer brush," Chin. J. Polym. Sci. 35, 857-865 (2017). (DOI, PDF)

    101. D. Xie, Z. R. Qiu, L. Wan, D. N. Talwar, H.-H. Cheng, S. Liu, T. Mei, and Z. C. Feng, "Spectroscopic ellipsometry and X-ray diffraction  studies on Si1-xGex/Si epifilms and superlattices," Appl. Surf. Sci. 421, 748-754 (2017). (DOI,PDF)

    102. X. Chen, Y. Shi, H. Jiang, C. Zhang, and S. Liu, "Nondestructive analysis of lithographic patterns with natural line edge roughness from Mueller matrix ellipsometric data," Appl .Surf. Sci. 388, 524-530 (2016). (DOI, PDF)

    103. K. Zhang, K. Gao, R. Xia, Z. Wu, C. Sun, J. Cao, L. Qian, W. Li, S. Liu, F. Huang, X. Peng, L. Ding, H.-L. Yip, and Y. Cao, "High-performance polymer tandem solar cells employing a new n-type conjugated polymer as an interconnecting layer," Adv. Mater. 28, 4817-4823 (2016). (DOI, PDF)

    104. X. Chen, W. Du, K. Yuan, J. Chen, H. Jiang, C. Zhang, and S. Liu, "Development of a spectroscopic Mueller matrix imaging ellipsometer for nanostructure metrology," Rev. Sci. Instrum. 87, 053707 (2016). (DOI, PDF)

    105. J. Zhu, Y. Shi, L. L. Goddard, and S. Liu, "Application of measurement configuration  optimization for accurate metrology of sub-wavelength dimensions in multilayer gratings using optical scatterometry," Appl. Opt. 55, 6844-6849 (2016). (DOI, PDF)

    106. H. Gu, X. Chen, H. Jiang, C. Zhang, W. Li, and S. Liu, "Accurate alignment of optical axes of a biplate using a spectroscopic Mueller matrix ellipsometer," Appl. Opt. 55, 3935-3941 (2016). (DOI, PDF)

    107. W. Li, H. Jiang, C. Zhang, X. Chen, H. Gu, and S. Liu, "Characterization of curved surface layer by Mueller matrix ellipsometry,” J. Vac. Sci. Technol. B 34, 020602 (2016). (DOI, PDF)

    108. W. Li, C. Zhang, H. Jiang, X. Chen, and S. Liu, "Depolarization artifacts in dual rotating compensator Mueller matrix ellipsometry," J. Opt. 18, 055701 (2016). (DOI, PDF)

    109. H. Gu, X. Chen, H. Jiang, C. Zhang, and S. Liu, " Optimal broadband Mueller matrix ellipsometer using multi-waveplates with flexibly oriented axes," J. Opt. 18, 025702 (2016). (DOI, PDF)

    110. J. Zhu, H. Jiang, Y. Shi, X. Chen, C. Zhang, and S. Liu, "Improved nanostructure reconstruction by performing data refinement in optical scatterometry," J. Opt. 18, 015605 (2016). (DOI, PDF)

    111. 陈修国, 袁奎, 杜卫超, 陈军, 江浩, 张传维, 刘世元, "基于Mueller矩阵成像椭偏仪的纳米结构几何参数大面积测量," 物理学报 65, 070703 (2016). (DOI, PDF)

    112. 陶泽, 刘佳敏, 张传维, 陈修国, 江浩, 刘世元, "基于偏振态空间调制的紧凑型偏振光谱仪," 红外与毫米波学报 35, 557-563 (2016). (DOI, PDF)

    113. 董正琼, 刘世元, 陈修国, 石雅婷, 张传维, 江浩, "基于灵敏度分析的一维纳米结构光学散射测量条件优化," 红外与毫米波学报 35, 116-122 (2016). (DOI, PDF)

    114. X. Chen, H. Jiang, C. Zhang, and S. Liu, "Towards understanding the detection of profile asymmetry from Mueller matrix differential decomposition," J. Appl. Phys. 118, 225308 (2015). (DOI, PDF)

    115. S. Liu, W. Du, X. Chen, H. Jiang, and C. Zhang, "Mueller matrix imaging ellipsometry for nanostructure metrology," Opt. Express 23, 17316-17329 (2015). (DOI, PDF)

    116. S. Liu, X. Chen, and C. Zhang, "Development of a broadband Mueller matrix ellipsometer as a powerful tool for nanostructure metrology," Thin Solid Films 584, 176-185 (2015). (DOI, PDF)

    117. J. Zhu, S. Liu, H. Jiang, C. Zhang, and X. Chen, "Improved deep-etched multilayer grating reconstruction by considering etching anisotropy and abnormal errors in optical scatterometry," Opt. Lett. 40, 471-474 (2015). (DOI, PDF)

    118. J. Zhu, H. Jiang, Y. Shi, C. Zhang, X. Chen, and S. Liu, "Fast and accurate solution of inverse problem in optical scatterometry using heuristic search and robust correction," J. Vac. Sci. Technol. B 33, 031807 (2015). (DOI, PDF)

    119. H. Gu, S. Liu, X. Chen, and C. Zhang, "Calibration of misalignment errors in composite waveplates using Mueller matrix ellipsometry," Appl. Opt. 54, 684-693 (2015). (DOI, PDF)

    120. Y. Zhang, X. Zhou, K. Cao, X. Chen, Z. Deng, S. Liu, B. Shan, and R. Chen, "Ellipsometry study on Pd thin film grown by atomic layer deposition with Maxwell-Garnett effective medium approximation model," Thin Solid Films 593, 144-149 (2015). (DOI, PDF)

    121. X. Wu, S. Liu, W. Lv, and E. Y. Lam, "Sparse nonlinear inverse imaging for shot count reduction in inverse lithography," Opt. Express 23, 26919-26931 (2015). (DOI, PDF)

    122. T. Sun, Z. Xu, H. Xu, W. Zhao, X. Wu, S. Liu, Z. Ma, J. He, S. Liu, and J. Peng, "Direct tailoring the Si substrate for antireflection via random nanohole nanoimprint," J. Nanosci. Nanotechnol. 15, 1297-1303 (2015). (DOI, PDF)

    123. X. Chen, C. Zhang, S. Liu, H. Jiang, Z. Ma, and Z. Xu, "Mueller matrix ellipsometric detection of profile asymmetry in nanoimprinted grating structures," J. Appl. Phys. 116, 194305 (2014). (DOI, PDF)

    124. J. Zhu, S. Liu, X.  Chen, C. Zhang, and H. Jiang, "Robust solution to the inverse problem in  optical scatterometry," Opt. Express 22, 22031-22042 (2014). (DOI, PDF)

    125. X. Chen, S. Liu, C. Zhang, H. Jiang, Z. Ma, T. Sun, and Z. Xu, "Accurate characterization of  nanoimprinted resist patterns using Mueller matrix ellipsometry," Opt. Express 22, 15165-15177 (2014). (DOI, PDF)

    126. S. Xu, C. Zhang, H. Wei, and S. Liu, "A single-image method of aberration retrieval for imaging systems under partially  coherent illumination," J. Opt. 16, 072001 (2014). (DOI, PDF)

    127. X. Chen, S. Liu, H. Gu, and C. Zhang, "Formulation of error propagation and estimation in grating reconstruction by a dual-rotating compensator Mueller matrix polarimeter," Thin Solid Films 571, 653-659 (2014). (DOI, PDF)

    128. Z. Dong, S. Liu, X. Chen, and C. Zhang, "Determination of an optimal measurement configuration in optical scatterometry using global sensitivity analysis," Thin Solid Films 562, 16-23 (2014). (DOI, PDF)

    129. W. Lv, E. Y. Lam, H. Wei, and S. Liu, "Cascadic multigrid algorithm for robust inverse mask synthesis in optical lithography," J. Micro/Nanolith. MEMS MOEMS 13, 023003 (2014). (DOI, PDF)

    130. W. Lv, S. Liu, X. Wu, and E. Y. Lam, "Illumination source optimization in optical lithography via derivative-free optimization," J. Opt. Soc. Am. A 31, B19-B26 (2014). (DOI, PDF)

    131. X. Zhou, C. Zhang, H. Jiang, H. Wei, and S. Liu, "Efficient representation of mask transmittance functions for vectorial lithography simulations," J. Opt. Soc. Am. A 31, B10-B18 (2014). (DOI, PDF)

    132. X. Wu, S. Liu, W. Lv, and E. Y. Lam, "Robust and efficient inverse mask synthesis with basis function representation," J. Opt. Soc. Am. A 31, B1-B9 (2014). (DOI, PDF)

    133. X. Wu, S. Liu, J. Li, and E. Y. Lam, "Efficient source mask optimization with Zernike polynomial functions for source representation," Opt. Express 22, 3924-3937 (2014). (DOI, PDF)

    134. H. Long, T. Shi, S. Jiang, S. Xi, R. Chen, S. Liu, G. Liao, and Z. Tang, "Synthesis of a nanowire self-assembled hierarchical ZnCo2O4 shell/Ni current collector core as binder-free anodes for high-performance Li-ion batteries," J. Mater. Chem. A 2, 3741-3748 (2014). (DOI, PDF)

    135. X. Wu, Z. Xu, B. Liu, T. Sun, W. Zhao, S. Liu, Z. Ma, F. Zhao, S. Wang, X. Zhang, S. Liu, and J. Peng, "Effect of cation and anion defects on the resistive switching polarity of ZnOx thin films," Appl. Phys. A 114, 847-852 (2014). (DOI, PDF)

    136. T. Sun, W. Zhao, X. Wu, S. Liu, Z. Ma, J. Peng, J. He, H. Xu, S. Liu, and Z. Xu, "Porous light-emitting diodes with patterned sapphire substrates realized by high-voltage self-growth and soft UV nanoimprint processes," J. Lightwave. Technol. 32, 326-332 (2014). (DOI, PDF)

    137. 刘世元, "计算测量问题与求解方法初探," 机械工程学报 50, 1-10 (2014). (DOI, PDF)

    138. 陈修国, 刘世元, 张传维, 吴懿平, 马智超, 孙堂友, 徐智谋, "基于Mueller矩阵椭偏仪的纳米压印模板与光刻胶光栅结构准确测量," 物理学报 63, 180701 (2014). (DOI, PDF)

    139. 马智超, 徐智谋, 彭静, 孙堂友, 陈修国, 赵文宁, 刘思思, 武兴会, 邹超, 刘世元, "基于光谱椭偏仪的纳米光栅无损检测," 物理学报 63, 039101 (2014). (DOI, PDF)

    140. S. Liu, X. Zhou, W. Lv, S. Xu, and H. Wei, "Convolution-variation separation method for efficient modeling of optical lithography," Opt. Lett. 38, 2168-2170 (2013). (DOI, PDF)

    141. X. Chen, C. Zhang, and S. Liu, "Depolarization  effects from nanoimprinted grating structures as measured by Mueller matrix  polarimetry," Appl. Phys. Lett. 103, 151605 (2013). (DOI, PDF)

    142. W. Lv, Q. Xia, and S. Liu, "Mask-filtering-based inverse lithography," J. Micro/Nanolith. MEMS MOEMS 12, 043003 (2013). (DOI, PDF)

    143. X. Chen, S. Liu, C. Zhang, and H. Jiang, "Improved measurement accuracy in optical scatterometry using correction-based  library search," Appl. Opt. 52, 6727-6734 (2013). (DOI, PDF)

    144. X. Chen, S. Liu, C. Zhang, and H. Jiang, "Measurement configuration optimization for accurate grating reconstruction by Mueller matrix polarimetry," J. Micro/Nanolith. MEMS MOMES 12, 033013 (2013). (DOI, PDF)

    145. W. Lv, S. Liu, Q. Xia, X. Wu, Y.  Shen, and E. Y. Lam, "Level-set-based inverse lithography for mask synthesis using the conjugate gradient and an optimal time step," J. Vac. Sci. Technol. B 31, 041605 (2013). (DOI, PDF)

    146. X. Chen, S. Liu, C. Zhang, and J. Zhu, "Improved measurement accuracy in optical scatterometry using fitting error interpolation based library search," Measurement 46, 2638-2646 (2013).(DOI, PDF)

    147. J. Zhu, S. Liu, C. Zhang, X. Chen, and Z. Dong, "Identification and reconstruction of diffraction structures in optical scatterometry using support vector machine method," J. Micro/Nanolith. MEMS MOEMS 12, 013004 (2013). (DOI, PDF)

    148. P. Zhang, S. Liu, and H. Lv, "Fabrication and  properties of dual-level hierarchical structures mimicking gecko foot hairs," J. Nanosci. Nanotechnol. 13, 781-786 (2013). (DOI, PDF)

    149. J. Li, S. Liu, and E. Y. Lam, "Efficient source and mask  optimization with augmented Lagrangian methods in optical lithography," Opt. Express 21, 8076-8090 (2013). (DOI, PDF)

    150. H. Jiang, B. Yang, and S. Liu, "Effects of transverse shear on strain stiffening of biological fiber networks," CMC-Comput. Mater. Con. 38, 61-77 (2013). (DOI, PDF)

    151. Q. Xia, T. Shi, S. Liu, and M. Wang, "Shape and topology optimization for tailoring stress in a local region to enhance performance of piezoresistive sensors," Comput. Struct. 114-115, 98-105 (2013). (DOI, PDF)

    152. Q. Xia, T. Shi, S. Liu, and M. Wang, "Optimization of stresses in a local region for the maximization of sensitivity and  minimization of cross-sensitivity of piezoresistive sensors," Struct. Multidisc. Optim. 48, 927-938 (2013). (DOI, PDF)

    153. W. Zhu, T. Shi, Z. Tang, B. Gong, G. Liao, and S. Liu, "Numerical analysis of transmission efficiency for parabolic optical fiber nano-probe," Opt. Express 21, 28103-28110 (2013). (DOI, PDF)

    154. T. Sun, Z. Xu, W. Zhao, X. Wu, S. Liu, Z. Zhang, S. Wang, W. Liu, S. Liu, and J. Peng, "Fabrication of the similar porous alumina silicon template for soft UV nanoimprint lithography," Appl. Surf. Sci. 276, 363-368 (2013). (DOI, PDF)

    155. T. Sun, Z. Xu, H. Xu, W. Zhao, X. Wu, S. Liu, Z. Ma, J. He, S. Liu, and J. Peng. "Photonic crystal structures on nonflat surfaces fabricated by dry lift-off soft UV nanoimprint lithography," J. Micromech. Microeng. 23, 125002 (2013). (DOI, PDF)

    156. 张铮, 徐智谋, 孙堂友, 何健, 徐海峰, 张学明, 刘世元, "硅表面抗反射纳米周期阵列结构的纳米压印制备与性能研究," 物理学报 62, 168102 (2013). (DOI, PDF)

    157. S. Liu, S. Xu, X. Wu, and W. Liu, "Iterative method for in situ measurement  of lens aberrations in lithographic tools using CTC-based quadratic aberration  model," Opt. Express 20, 14272-14283 (2012). (DOI, PDF)

    158. H. Wei and S. Liu, "Comment on ‘Three-dimensional imaging of a phase object  from a single sample orientation using an optical laser’," Phys. Rev. B 86, 226101 (2012). (DOI, PDF)

    159. P. Gong, S. Liu, W. Lv, and X. Zhou, "Fast aerial image simulations for partially coherent systems by transmission cross coefficient decomposition with analytical kernels," J. Vac. Sci. Technol. B 30, 06FG03 (2012). (DOI, PDF)

    160. S. Liu, Y. Ma, X. Chen, and C. Zhang, "Estimation of the convergence order of rigorous coupled-wave analysis for binary gratings in optical critical dimension metrology," Opt. Eng. 51, 081504 (2012). (DOI, PDF)

    161. S. Liu, W. Liu, X. Zhou, and P. Gong, "Kernel-based parametric analytical model of source intensity distributions in lithographic tools," Appl. Opt. 51, 1479-1486 (2012). (DOI, PDF)

    162. S. Liu, P. Zhang, H. Lv, C. W. Zhang, and Q. Xia, "Fabrication of high aspect ratio microfiber arrays that mimic gecko foot hairs," Chin. Sci. Bull. 57, 404-408 (2012). (DOI, PDF)

    163. Q. Xia, T. Shi, S. Liu, and M. Wang, "A level set solution to the stress-based structural shape and topology optimization," Comput. Struct. 90-91, 55-64 (2012). (DOI, PDF)

    164. H. Long, S. Xi, D. Liu, T. Shi, Q. Xia, S. Liu, and Z. Tang, "Tailoring diffraction-induced light distribution toward controllable fabrication of suspended C-MEMS," Opt. Express 20, 17126-17135 (2012). (DOI, PDF)

    165. D. Liu,  T. Shi, S. Xi, W. Lai, S. Liu, X. Li, and Z. Tang, "Concentration gradient induced morphology evolution of silica nanostructure growth on  photoresist-derived carbon micropatterns," Nanoscale Res. Lett. 7, 496 (2012). (DOI, PDF)

    166. S. Xi, T. Shi, L. Xu, Z. Tang, D. Liu, X. Li, and S. Liu, "Metal-catalyst-free synthesis and characterization of single-crystalline silicon oxynitride nanowires," J. Nanomater. 2012,  620475 (2012). (DOI, PDF)

    167. S. Liu, X. Wu, W. Liu, and C. Zhang, "Fast aerial image  simulations using one basis mask pattern for optical proximity correction," J. Vac. Sci. Technol. B 29, 06FH03 (2011). (DOI, PDF)

    168. S. Liu, W. Liu, and X. Wu, "Fast evaluation of aberration-induced  intensity distribution in partially coherent imaging systems by cross triple correlation," Chin. Phys. Lett. 28, 104212 (2011). (DOI, PDF)

    169. S. Liu, W. Liu, and T. Zhou, "Fast algorithm for quadratic aberration model in optical lithography based on cross triple correlation," J. Micro/Nanolith. MEMS MOEMS 10, 023007 (2011). (DOI, PDF)

    170. S. Liu, P. Zhang, X. Cheng, R. Malik, and Z. Tang, "Optimal design of high-aspect-ratio micro/nano hierarchical structures mimicking gecko foot-hairs," Adv. Sci. Lett. 4,  1546-1551 (2011). (DOI, PDF)

    171. C. Zhang, S. Liu, T. Shi, and Z. Tang, "Fitting-determined formulation of effective medium approximation for 3D trench structures in model-based infrared reflectrometry," J. Opt. Soc. Am. A 28, 263-271 (2011). (DOI, PDF)

    172. 刘巍, 刘世元, 吴小飞, 张传维, "基于Sigmoid函数的离轴照明光源全参数解析模型," 物理学报 60, 054213 (2011). (DOI, PDF)

    173. W. Ma, T. Shi, Z. Tang, S. Liu, R. Malik, and L. Zhang, "High-throughput dielectrophoretic manipulation of bioparticles within fluids through biocompatible three-dimensional microelectrode array," Electrophoresis 32, 494-505 (2011). (DOI, PDF)

    174. R. Malik, T. Shi, Z. Tang, S. Liu, "Effect of ultra violet process and annealing on reliability in low temperature silicon wafer direct  bonding," Adv. Sci. Lett. 4, 774-780 (2011). (DOI, PDF)

    175. Q. Xia, T. Shi, M. Wang, and S. Liu, "Simultaneous optimization of cast part and parting direction using level set method," Struct. Multidisc. Optim. 44, 751-759 (2011). (DOI, PDF)

    176. Z. Tang, R. Malik, J. Gong, T. Shi, and S. Liu, "Optimal design of 3-D carbon microelectrode array for dielectrophoretic manipulation of nanoparticles in fluids," J. Nanosci. Nanotechnol. 11, 10433-10437 (2011). (DOI, PDF)

    177. W. Liu, S. Liu, T.  Shi, and Z. Tang, "Generalized formulations for aerial image based lens aberration metrology in lithographic tools with arbitrarily shaped illumination sources," Opt. Express 18, 20096-20104 (2010). (DOI, PDF)

    178. Z. Tang, R. Malik, T. Shi, X. Wang, P. Peng, X. Li, W. Lai, and S. Liu, "Analytical modeling of wetting dependence on surface nanotopography," Thin Solid Films 519, 1387-1390 (2010). (DOI, PDF)

    179. Z. Tang, T. Shi, J. Gong, L. Nie, and S. Liu, "An optimized process for fabrication of high-aspect-ratio photoresist-derived carbon microelectrode array on silicon substrate," Thin Solid Films 518, 2701-2706 (2010). (DOI, PDF)

    180. Q. Xia, T. Shi, M. Wang, and S. Liu, "A level set based method for the optimization of cast part," Struct. Multidisc. Optim. 41, 735-747 (2010). (DOI, PDF)

    181. W. Liu, S. Liu, T. Zhou, and L. Wang, "Aerial image based technique for measurement of lens aberrations up to 37th Zernike coefficient in lithographic  tools under partial coherent illumination," Opt. Express 17, 19278-19291 (2009). (DOI, PDF)

    182. C. Zhang, S. Liu, T. Shi, and Z. Tang, "Improved model-based infrared reflectrometry for measuring deep trench structures," J. Opt. Soc. Am. A 26, 2327-2335 (2009). (DOI, PDF)

    183. Z. Tang, P. Peng, T. Shi, G. Liao, L. Nie, and S. Liu, "Effect of nanoscale surface topography on low temperature direct wafer bonding process with UV activation," Sensor. Actuat. A 151, 81-86 (2009). (DOI, PDF)

    184. 刘世元, 张传维, 沈宏伟, 顾华勇, "基于傅里叶变换红外反射谱的DRAM深沟槽结构测量系统研究," 光谱学与光谱分析 29, 935-939 (2009). (DOI, PDF)

    185. Z. Tang, T. Shi, G. Liao, and S. Liu, "Modeling the formation of spontaneous wafer direct bonding under low temperature," Microelectron. Eng. 85, 1754-1757 (2008). (DOI, PDF)

    186. 刘世元, 顾华勇, 张传维, 沈宏伟, "基于修正等效介质理论的微纳深沟槽结构反射率快速算法研究," 物理学报 57, 5996-6001 (2008). (DOI, PDF)



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