Nanoscale and Optical Metrology (NOM) Group

Shiyuan LIU
Professor

Shiyuan LIUProfessor of Mechanical EngineeringProfessor of Optical Engineeringshyliu@hust.edu.cnProfessor Shiyuan Liu received his PhD in Mechanical Engineering from Huazhong University of Science and Technology (HUST) in 1998, and worked as a Visiting Scholar at University of Manchester, UK, from 2000 to 2001. He became a Professor of Mechanical Engineering at HUST in 2005, and now is leading ...

Zirong Tang
Professor

Zirong Tang , born in September 1968, is a professor and doctoral tutor in the Department of Electrical and Mechanical Sciences and the National Key Laboratory for Digital Manufacturing Equipment and Technology at the School of Mechanical Science and Technology of Huazhong University of Science and Technology. He graduated from Beijing University of Chemical Engineering with a bachelor's degree in chemical engineering in 1990 and received a Ph.D. in Materials Science and Engineering from the University of California, Irvine, usa in 2001.

Hao JIANG
Professor

Hao Jiang, born in 1979, received a bachelor's degree in mechanical engineering and automation and financial management from Huazhong University of Science and Technology in 2000. He obtained a master's degree in mechanical and electrical engineering from Huazhong University of Science and Technology in 2004. In 2011, he received a Ph.D. in mechanical engineering from the Florida Institute of Technology. From 2004 to 2008, he worked as a software system engineer and senior software engineer at Shanghai Microelectronics Equipment Co., Ltd. and the American Ringing Air Conditioning System Asia R&D Center. He was engaged in the development of high-precision motion control system software and the design of large commercial central air conditioning control systems. From 2011 to 2014, he worked as a postdoctoral researcher and part-time lecturer at the University of Texas at Arlington.

Xiuguo CHEN
Professor

Xiuguo Chen received his B.E. in Mechanical Design Manufacturing and Automation from Shandong University of Technology in 2007, and M.E. in Mechanical and Electronic Engineering from Huazhong University of Science and Technology in 2009. He received his PhD in Mechanical Engineering from Huazhong University of Science and Technology in 2013. After two years of postdoctoral research in the NOM group, he is currently working as an associate professor on optical techniques and instrumentation for nanoscale and nondestructive metrology. During December, 2016 to August, 2018, he worked as a JSPS Research Fellow at Tohoku University (Sendai, Japan).

Jinlong Zhu
Professor

Jinlong Zhu is currently a Professor in the School of Mechanical Science and Engineering at Huazhong University of Science and Technology. He obtained his Ph.D. in Mechatronic Engineering from Huazhong University of Science and Technology in 2015. From 2015 to 2020, he was a Postdoctoral Research Associate at Micro and Nanotechnology Laboratory at the University of of Illinois at Urbana-Champai...

Chuanwei ZHANG
Associate Professor

Chuanwei Zhang received his B.E. and ME in Mechanical Engineering from Wuhan University in 2004 and 2006 respectively, and then received his PhD in Mechanical Engineering from Huazhong University of Science and Technology in 2009. After two years of postdoctoral research in the NOM group, he is currently working as a assistant professor on optical techniques for critical dimension, overlay, and 3D profile metrology in nanomanufacturing.

Honggang GU
Postdoc

Honggang Gu, born in 1986, graduated from Huazhong University of Science and Technology in June 2011 with a bachelor's degree in engineering. In June 2016, he obtained a doctorate in mechanical engineering from Huazhong University of Science and Technology. At present, he is engaged in post-doctoral research in the nano-optical measurement research group. His main research direction is ellipsometry theory method and ellipsometry application development.

Xiong Yuan
Mechanical engineer

Xiong Yuan, born in 1991, graduated from Southwest University of Science and Technology in 2019 with a bachelor's degree in mechanical design and manufacturing and automation, and 8 years of work experience. He is a research assistant at the Nano-Optical Research Center of the School of Mechanical Science and Engineering of Huazhong University of Science and Technology, engaged in structural de...

Jijie YIN
Secretary

Yin Jijie,born in 1995,graduated from Central China Normal University with a bachelor's degree in managemen .She is currently the secretary of the Nano Optical Measurement Research Group and is responsible for the day-to-day affairs of the research group.

Zhao yunxia
Research Assistant

Zhao yunxia, graduated from Xi'an Jiaotong University with a master's degree in material science. Mainly engaged in the management of  Nanoscale and Optical Metrology  Group  instruments and project data.

Jiamin LIU
Postdoctoral,2020-

Jiamin Liu, born in 1994, graduated from the Mechanical and Electrical Engineering College of Wuhan University of Technology in 2014 with a bachelor's degree in mechanical engineering and automation. In 2014, he took a master's degree in mechanical engineering from Huazhong University of Science and Technology and joined the nano-optical measurement group. He obtained a master's degree in engineering and continued his doctoral degree in mechanical engineering in the same year. His main research direction is ultra-fast ellipsometer.

Song ZHANG
Ph.D Candidate,2016-

Song Zhang received his B.E. in Mechanical Engineering from Huazhong University of Science and Technology in 2016, and then started his graduate program in Nanoscale and Optical Metrology Group in September 2016. He focuses on the Development and application of the six-channel Stokes polarizer.

Chao CHEN
Ph.D Candidate,2015-

Chao Chen, born in 1992. In 2015, he graduated from Huazhong University of Science and Technology with a bachelor's degree in mechanical design, manufacturing and automation. He graduated with a master's degree in nano-optical measurement research group in September 2015 and became a doctor in 2016. His research direction is tomography Muller. Matrix scatterometer.

Mingsheng FANG
Ph.D Candidate,2017-

I am M.S.Fang, I was born in1995. I graduated form the Physics College of Huazhong University of Science and Technology in 2017. I joined in NOM research group in September 2017, and the research direction was the application of ellipsometer in topological insulators.

Lin ZHANG
Ph.D Candidate,2017-

Lin Zhang received his B.E. in Mechanical Engineering from Southwest University in 2017, and then joined the Nanoscale and Optical Metrology group in September 2017 to pursue a doctoral degree. He focuses on ultrafast optical measurement.

Xuenan ZHAO
Ph.D Candidate,2016-

Xuenan Zhao received her B.E. in Mechanical Design Manufacturing and Automation from Xiamen University in 2016. She started her graduate program in Nanoscale and Optical Metrology Group in September 2016, with research interest in applications of spectral ellipsometry on organic materials and solar cells.

Cai WANG
Ph.D Candidate,2016-

Cai Wang received his B.E. in Mechanism design, manufacturing and automatization from University of Electronic Science and Technology of China in 2016, and then started his graduate program in Nanoscale and Optical Metrology Group in September 2016. He focuses on modeling for metrology in nanoscale structures and development in through focus Muller matrix microscopy.

Zhengfeng GUO
Ph.D Candidate,2018-

Zhengfeng Guo, born in 1993, received his B.E. in Optoelectronic Materials and Devices from Nanjing Tech University in 2016, and in that year's September, he studied in Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology. With his reseach interest in Mueller matrix ellipsometry and its applications, he jioned Nanoscale and Optical Metrology Group to start his PhD career in September 2018.

Tianjuan Yang
Ph.D Candidate,2019-

Tianjuan YangPh.D CandidateTianjuan Yang, received a bachelor's degree in mechanical engineering from Zhengzhou University in 2015 and a master's degree in vehicle engineering from Hunan University in 2018. In 2019, she joined Huazhong University of Science and Technology Nano-Optical Measurement group to pursue a doctoral degree. Her research direction is the critical dimensional small angle x...

Chuangchuang Chen
Ph.D Candidate,2020-

Chuangchuang ChenPh.D CandidateChuangchuang Chen, granted a master degree from Dalian University of Tech. in 2016. And then joined NOM Group to do PhD research in 2020, focusing on nano-scale defect inspection & metrology

Sheng SHENG
Graduate student,2017-

Sheng Sheng, born in 1995, graduated from School of Mechanical Science and Engineering, Huazhong University of Science and Technology in June 2017, received a bachelor's degree in engineering. In September 2017 joined the Nanoscale Optical Metrology Group.

Jin Hu
Ph.D Candidate,2021-

Jin Hu，born in 1996, graduated from Southwest University in 2019, majoring in mechanical design and manufacturing and automation, with a bachelor's degree in engineering. Joined the Nanoscale and Optical Metrology Research Center in December 2019

Chunxiao Mu
Ph.D Candidate,2021-

Chunxiao Mu, born in 1993, graduated from School of Mechanical Science and Engineering, Huazhong University of Science and Technology in 2015, received a bachelor’s degree in engineering. He obtained a master’s degree in mechanical engineering from Leibniz University Hannover in 2020. In 2021, he joined Nanoscale and Optical Metrology Group to study for doctorate. His main research direction ...

Linya Chen
Ph.D Candidate,2021-

Linya Chen, born in 1999, graduated from Northeastern University in June 2019 with a bachelor's degree in mechanical engineering and automation. Joined the Nano Measurement Optical Research Group in September 2019

Shuo Liu
Ph.D Candidate,2022-

Shuo Liu, born in 1997, graduated from Ocean University of China in June 2019 with a bachelor's degree in mechanical design and manufacture and automation. Joined the Nanoscale and Optical Metrology Research Center in September 2019

Ming Gong
Ph.D Candidate,2022-

Ming Gong,born in 1998, graduated from School of Mechanical and Electronic Engineering of Wuhan University of Technology in June 2020 with a bachelor's degree in engineering. In September 2020 joined the NOM Group.The main research direction is the DUV-ellipsometer

Jiahao Zhang
Ph.D Candidate,2022-

Jiahao ZhangGraduate studentJiahao Zhang, born in 1998, graduated from the School of Mechanical and Engineering, Huazhong University of Science and Technology, majored in mechanical design, manufacturing and automation and got a bachelor's degree in 2020.6. In September 2020, joined the NOM group for a master's degree. The research direction is critical dimension small angle X-ray scattering me...

Jinsong Zhang
Ph.D Candidate, 2022-

Jinsong ZhangGraduate studentJinsong Zhang, born in 1998, graduated from the School of Mechanical Engineering of Huazhong University of Science and Technology in 2020 with a bachelor's degree in engineering. He obtained the master's degree in engineering in 2022 and continued his doctoral degree in mechanical engineering in the same year. His main research direction is super-resolution defect i...

Shaopeng Guo
Ph.D Candidate, 2021-

Shaopeng Guo, born in 1997, received his B.E in Mechanical Engineering from Zhengzhou University in 2019. In 2021, he obtained a master's degree in engineering from Huazhong University of Science and Technology and joined the nano-optical measurement group to pursue a doctoral degree. He focuses on computational lithography and computational imaging

Wenyu Chen
Ph.D Candidate,2021-

Wenyu Chen, born in 1998, received a bachelor's degree in Mechanical Design, Manufacturing, and Automation from Sichuan University in 2019, and then studied at the School of Mechanical and Engineering, Huazhong University of Science and Technology. In September 2021, he joined the NOM research group to pursue a Ph.D degree with a research interest in the integrated photonics devices for nanosca...

Li Liu
Ph.D Candidate,2021-

Li Liu , born in 1995, received a master's degree in mechanical engineering from Dalian University of Technology in 2021. In September of the same year, he joined the nano-optical measurement group, researching EUV nano defect detection

Lixuan Song
Graduate student,2019-

Lixuan SongGraduate studentLixuan Song, Born in 1996, graduated from college of engineering, China Agricultural University in June 2019, majoring in mechanical design, manufacturing and automation, and obtained a bachelor of engineering degree. In 2019, He will study for a master's degree in mechanical engineering at Huazhong University Of Science and Technology and join the nanometer optical m...

Zhou Jiang
Graduate student,2019-

Zhou JiangGraduate student, 2019-Zhou Jiang, born in lu 'an, anhui province in 1997, graduated from northeastern university in June 2019 with a bachelor's degree in mechanical engineering.He joined the NOM group in September 2019

Liusheng Huang
Graduate student,2020-

Liusheng Huang, postgraduate student, was born in 1998 and graduated from Changchun University of Science and Technology in 2020 with a Bachelor of Science degree. In September of the same year, he joined the NOM research group. His main research direction is the study of substrate and environmental dielectric effect on the photoelectric properties of two-dimensional TMDs

Wu Qizhe
Ph.D Candidate,2022-

Wu Qizhe, born in 1994, graduated from Wuhan University of Science and Technology in 2018 with a master's degree. In September 2022, joined the Nano Optical Measurement Group.

Hang Zhao
Ph.D Candidate,2022-

Hang Zhao, born in 1998, received a master's degree in instrument and meter engineering from Hubei University of Technology in 2022. Then he joined the Nanoscale and Optical Metrology group to do PhD research in September, focusing on electron beam  inspection & metrology.

Wenjie Li
Graduate student,2020-

Wenjie LiGraduate studentWenjie Li, born in 1998, graduated from the School of Mechanical Engineering of Huazhong University of Science and Technology in 2020 with a bachelor's degree in engineering. In September of the same year, he joined the NOM research group. His main research direction is diefect detection in integrated circuits

Qingyue Wu
Graduate student,2020-

Qingyue WuGraduate studentQingyue Wu received his B.E. in Mechanical Design Manufacturing and Automation from Dalian University of Technology in 2020, and then started his graduate program in Nanoscale and Optical Metrology Group in September 2020. He focuses on computational lithography

Haofeng Chen
Graduate student,2020-

Haofeng Chen，born in 1998. In 2020, he graduated from The College of Mechanical Engineering and Automation, Northeastern University, with a bachelor's degree in Engineering. In September of the same year, he joined the NOM research group. His research interests are computational photolithography

Jingmin Zhang
Graduate student,2020-

Jingmin Zhang , a graduate student, was born in 1998 and graduated from Chongqing University in June 2020 with a bachelor's degree in mechanical and electronic engineering. In September 2020, i joined the nano optical measurement group of the school of mechanics of Huazhong University of science and technology to pursue master's degree, and my research direction is the control system of continu...

Zhaoru Hou
Graduate student,2021-

Zhaoru Hou , born in 1999, graduated from Northeastern University with a degree in Engineering in Mechanical Engineering and Automation in June 2020. He joined the nanometer optics measurement research group in September 2021

Pinxuan He
Graduate student,2021-

Pinxuan He, born in 1997, graduated from the School of Power and Mechanical Engineering, Wuhan University , majoring in mechanical design, manufacturing and automation, with a bachelor's degree in engineering in 2021.6. In September 2021, he joined the nanoscale and optical metrology research group and started to study the calculation of diffraction field of EUV mask

Lei Zhong
Graduate student,2021-

Lei Zhong , born in 1999, graduated from The mechanical Manufacturing and Automation major of Central South University in June 2021 with a bachelor of Engineering degree. In September 2021, I studied for the master's degree of mechanical Engineering in Huazhong University of Science and Technology without examination, and joined the nano optical measurement group with the research direction of ...

Yu Zhou
Graduate student,2021-

Graduate student Yu Zhou, born in 1999, received his B.E. in Mechanism design, manufacturing and automatization from Ocean University of China in 2021, and then started his graduate program in Nanoscale and Optical Metrology Group in September 2021. He focuses on defect inspection of EUV lithographic masks

Zhangyong Liu
Graduate student,2021-

Zhangyong Liu, graduate student, was born in 1998 and graduated from Huazhong University of Science and Technology with a bachelor's degree in engineering in June 2021, majoring in measurement and control technology and instrumentation. In September 2021, he joined the research group of the Nano Optical Measurement Research Center

Wenlong Chen
graduate student, 2021-

Wenlong Chen,born in 1999, graduated from Huazhong University of science and technology in June 2021 with a bachelor's degree in mechanical design and manufacture and automation. Joined the Nanoscale and Optical Metrology Resarch Center in September 2021

Peng Pan
Graduate student,2021-

Peng Pan, born in 2000, graduated from Hunan Universit with a bachelor's degree in Mechanical Design, Manufacturing and Automation in July 2021. In September 2021 joined the NOM research group.The main research direction is integrated processing and measurement technology

Lei Li
Graduate student,2021-

Lei Li,born in 1999,graduated from the school of Mechanical Engineering of Huazhong University of Science and Technology in June 2021.In July of the same year,he joined the NOM research group.His main research direction is EUV simulation

Renduo Cui
Graduate student,2021-

Born in 1999, graduated from Central South University in 2021, majoring in mechanical design and manufacturing and automation, with a bachelor's degree in engineering. Joined the Nano Optical Measurement Research Center in September 2021

Jianyuan Ma
Graduate student,2020-

Jianyuan MaGraduate studentJianyuan Ma, born in 1997, graduated from Zhengzhou University with a bachelor's degree in Mechanical Engineering in June 2020. In September of the same year, he joined the nanoscale and optical metrology research group, his main research direction was critical dimension small angle X-ray scattering measurement(CD-SAXS)

Bowen Deng
Graduate student,2020-

Bowen DengGraduate studentBowen Deng, born in 1998, graduated from School of Mechanical and Power Engineering, Zhengzhou University in June 2020, received a bachelor's degree in engineering. In September 2020 joined the Nanoscale Optical Metrology Group,  focusing on the development and application of the high-speed Mueller matrix ellipsometer

Hongfei Chen
Graduate student,2020-

Hongfei ChenGraduate studentHongfei Chen, born in 1998, graduated from School of Mechanical and Electronic Engineering, Wuhan University of Technology in June 2020, received a bachelor's degree in engineering. In September 2020 joined the Nanoscale Optical Metrology Group,  focusing on the Line scan film thickness meter based on Spectroscopy

Qi Zhang
Graduate student,2020-

Zhang QiGraduate studentZhang Qi, graduated from Huazhong University of Science and Technology in 2020， received a bachelor's degree in engineering. In the same year, he continued to study for a master's degree in mechanical engineering of HUST, and joined the Nanoscale Optical Metrology Group. The research direction is imaging ellipsometer data acquisition and processing and image stitching

Ming Yan
Graduate student,2021-

Ming Yan, born in 1998,  graduated from Northeast University with a bachelor's degree in Mechanical Engineering in June 2020.  In September of the same year,  joined  the Nanoscale Optical Metrology Group, His main research direction is defect detection of extreme ultra-violet lithographic masks.

Zhe Yu
Graduate student,2021-

Zhe Yu, born in 1998, graduated from School of Mechanical and Power Engineering, Zhengzhou University in June 2021, received a bachelor's degree in engineering. In September 2021 joined the Nanoscale Optical Metrology Group. His research interest is 3D nanometrology based on wavefront sensing techniques

Siqi Li
Graduate student,2021-

Siqi Li, Graduate student born in 1999, graduated from the School of Mechanical Engineering, China University of Mining and Technology, majoring in robotics,  with a bachelor's degree in engineering in 2021.6. In September 2021, study for a master's degree in mechanical engineering of HUST, and joined the Nanoscale Optical Metrology Group, focusing on the electrical modeling of OLED device

Haishuo Zhong
graduate student, 2021-

Haishuo Zhong,born in 1997, graduated from Ocean University of China in June 2021 with a bachelor's degree in mechanical design and manufacture and automation. Joined the Nanoscale and Optical Metrology Resarch Center in September 202

Zedi Li
Graduate student,2021-

Zedi Li, born in 1998, graduated from the School of Mechanical Engineering, Huazhong University of Science and Technology, majoring in mechanical design, manufacturing and automation, with a bachelor's degree in engineering in 2020.6. In September 2021, he joined the nanoscale and optical metrology research group. His main research direction was Computational optical imaging

Yun Chen
Graduate student,2021-

 Yun Chen, born in 1999, graduated from the School of Mechanical and Electrical Engineering of Wuhan Institute of Technology in June 2021 with a bachelor's degree in engineering. Joined the NOM research group in September 2021, and his main research direction is reflective film thickness meter

Xue Cui
Graduate student,2022-

Cui Xue, born in 2000, graduated from Shandong University in 2022, majoring in mechanical design and manufacturing and automation, with a bachelor's degree in engineering. In September 2022, she joined the NOM research group. Her main research direction is Nanooptical Measurement Group and her research direction is computational lithography.

Menglong Li
Graduate student,2022-

Menglong Li, born in 2000, graduated from the School of Mechanical Engineering, Huazhong University of Science and Technology, majoring in mechanical design, manufacturing and automation, with a bachelor's degree in engineering in 2022.6. Joined the NOM research group in September 2022.

Qihang Zhang
Graduate student,2022-

Qihang Zhang, born in 2000 in Lu 'an, Anhui province, graduated from the College of Mechanical and Vehicle Engineering of Chongqing University with a bachelor of Engineering degree in mechanical and electronic Engineering in June 2022. In September 2022, He studied for a master's degree in mechanical engineering at Huazhong University of Science and Technology without examination, and joined th...

Zhenyang Zhang
Graduate student,2022-

Zhenyang Zhang, born in 2000, graduated from the School of Mechanical Engineering of Huazhong University of Science and Technology in June 2022.In July of the same year,he joined the NOM research group.

Xianrui Feng
Graduate student,2022-

Xianrui Feng,born in 2000,graduated from the school of Mechanical Engineering of Huazhong University of Science and Technology in June 2021.In September of the same year,he joined the NOM research group.

Xiangyu Zhao
Graduate student,2022-

Xiangyu Zhao, born in 2000, graduated from Northeastern University in June 2022, majoring in Mechanical Engineering. In September 2021, it is recommended to enter Huazhong University of Science and Technology without examination. Join the Nano-Optical Measurement Group in August 2022, the main research direction is the quantum interaction of microcavity light-electron.

Chumiao Zhang
Graduate student,2022-

Chumiao Zhang, born in 1999,graduated from the school of Mechanical Engineering of Huazhong University of Science and Technology in June 2021.In September 2022,she joined the NOM research group.

Kan Chen
Graduate student,2022-

Chen Kan, born in 1999, graduated from Hunan University in June 2022 with a bachelor's degree in mechanical design, manufacturing and automation. In September 2022, he  joined the NOM research group.

Xinqin Liu
Graduate student,2022-

Liu Xinqin, born in 2001, graduated from the School of Civil and Hydraulic Engineering of Huazhong University of Science and Technology, and joined the NOM research group in September of the same year, and his research direction is photoelectrochemical wet etch.

Dingxuan Deng
Graduate student,2022-

Dingxuan Deng, born in 2000, graduated from Huazhong University of Science and Technology with a Bachelor of Engineering degree in Mechanical Design and Manufacturing and Automation in June 2022, and joined the Nano Optical Measurement Research Centre in September of the same year.

Shilong Yang
Graduate student,2022-

Shilong Yang, graduated from the School of Mechanical Science and Engineering of HUST in 2022 with a bachelor's degree in engineering. Joined the Nanoscale and Optical Metrology Research Center in September 2022.

Yifu Wang
Graduate student,2022-

Yifu Wang, born in 2000, graduated from the School of Mechanical and Engineering, Huazhong University of Science and Technology, majored in machanical design, manufacturing and automation and got a bachelor's degree in June 2022. In September 2022, he joined the NOM group for a master's degree.

Weigang Zhou
Graduate student,2022-

Weigang Zhou, born in 1999, graduated from DUT in June 2022 ，majoring in Mechanical Design, Manufacturing and Automation，with a bachelor's degree in engineering . In September 2022, study for a master's degree in mechanical engineering of HUST, and join the NOM group.

Xuesong Wang
Graduate student,2022-

Xuesong Wang, born in 2000, graduated from Wuhan University of Technology in June 2022 with a bachelor's degree in engineering, and joined the Nano-optical Measurement Research Center of Huazhong University of Science and Technology in September of the same year.

Chaoqun Li
Graduate student,2022-

Chaoqun Li, born in 1999, graduated from the School of Automotive Engineering of Wuhan University of Technology in June 2022 with a bachelor's degree in engineering. Joined the NOM research group in September 2022.

Pu Hu
Graduate student,2022-

Pu Hu, born in 2000, graduated from the Mechanical Design and Manufacturing and Automation Major of The Mechanical College of Huazhong University of Science and Technology in June 2022, and joined the NOM research group in September of the same year.